| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide wind-up film solar battery film forming device (a vacuum film forming device illustrated thereby) by which a characteristic of each thin film can be stably obtained, by equipping the device with a mechanism for imparting (controlling) the tension of a film in addition to elimination of various affects to film forming surfaces. SOLUTION: The vacuum film forming device employing a roll-to-roll method (or a stepping roll method) is provided with a mechanism, in which a film is given with a rotational displacement centered at an arbitrary rotational axis parallel to an axis line of a pair of rollers parallel to the width wise direction of the conveyed film, while keeping the relative position of the pair of rollers with two sides of the film sandwiched, thereby displacing the passage for conveying the film to control the tension of the film.</p> |
