| 摘要 |
PURPOSE: To obtain a highly reliable flow rate sensor by enhancing a strength of a diaphragm of a flow rate detection element. CONSTITUTION: Diaphragms (13a-13c) for detecting a flow rate are arranged in a direction orthogonal to a flow direction A of a fluid to be measured. Each of the diaphragms (13a-13c) is formed to have a longer side of a length longer by two times or more than a length of a shorter side, and is arranged so that the longer side is in parallel to the flow direction A of the fluid to be measured. Moreover, the diaphragms (13a-13c) have heating resistance bodies (4a-4c) and temperature measurement resistance bodies (6a-6c, 7a-7c) set side by side in the flow direction A of the fluid to be measured, respectively.
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