发明名称 MANUFACTURING METHOD AND MANUFACTURING EQUIPMENT FOR IMAGE DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method and manufacturing equipment for image display devices by reducing an evacuation time and facilitating realization of high vacuum degree, and consequently improving manufacturing efficiency. SOLUTION: In carrying in panel components 101, 102 constituting a panel of an image display device sequentially to plural decompressed processing chambers equipped with respective temperature control means to seal, the panel components after subjecting the panel components to plural processing treatments under temperature control, this manufacturing equipment has a baking chamber 106 to bake the panel components, and a gettering chamber 109 to subject the panel components to gettering, transferred after baking processing. The gettering temperature of the panel components in the gettering chamber 109 is set to be lower than the baking temperature of the panel components in the baking chamber 106.
申请公布号 JP2001338578(A) 申请公布日期 2001.12.07
申请号 JP20000298028 申请日期 2000.09.29
申请人 CANON INC 发明人 KANEKO TETSUYA;NAKADA KOHEI;MIYAZAKI TOSHIHIKO
分类号 H01J9/38;H01J9/24;H01J9/26;H01J9/39;H01J9/40;H01J9/46;H01J9/48;H01J29/94;(IPC1-7):H01J9/38 主分类号 H01J9/38
代理机构 代理人
主权项
地址