APPARATUS AND METHOD FOR INSPECTING SUBSTRATE PRODUCT, AND PROBE FOR INSPECTION

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for inspecting substrate products and a probe for inspection whereby whether or not substrate products are good can be easily inspected. SOLUTION: This substrate product-inspecting apparatus 10 is constituted of a signal generator 16 for applying voltage signals to the liquid crystal cell substrate 14, a light source 17 for illuminating the liquid crystal cell substrate 14 with light, a detector 18 for detecting an output light formed when the light of the light source 17 passes the liquid crystal cell substrate 14 or is reflected by the substrate 14, and a computer 24 for detecting signals of the detector 18.