发明名称 |
Surface analyzing apparatus |
摘要 |
It is so adapted that a sample is mounted on three-dimensional stages through a sample holder and a beam light emitted from a beam light oscillator is applied to a sample surface through a polarizing element different from polarization of the beam light or directly. An image of a foreign-matter on the sample surface scattered by the beam light is displayed on a monitor through a polarizing element different from the beam light, through a CCD camera mounted on an optical microscope. As a method of bringing the beam light until it is applied to the sample surface, there are a method of using an optical fiber for the beam light and a method of using an optical part such as a mirror.
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申请公布号 |
US2001048076(A1) |
申请公布日期 |
2001.12.06 |
申请号 |
US20010878869 |
申请日期 |
2001.06.11 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
WAKIYAMA SHIGERU;FUJINO NAOHIKO |
分类号 |
G01N21/88;G01N21/93;G01N21/94;G01N21/956;G01N23/00;G01N37/00;G01Q10/00;G01Q10/02;G01Q30/00;G01Q30/02;G01Q60/24;G01Q60/50;G01Q70/10;G02B21/00;G21K7/00;H01J3/14;H01J5/16;H01J37/00;H01J40/14;(IPC1-7):G21K7/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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