| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method highly reliably and highly precisely polishing an axially symmetric non-spherical shape such as an optical element. SOLUTION: When polishing a workpiece surface such as the optical element having the axially symmetric non-spherical shape using a small-diameter polishing tool, the shape of the workpiece face before machining (grinding) is measured to find an erroneous shape relative to a target shape, and a residence time distribution of the polishing tool performing polishing movement at a prescribed pattern necessary for removing the error shape by polishing and formed into the target shape is calculated. When calculating a shape correcting polishing work program for realizing the residence time distribution, the residence time distribution is divided into a part executed in a spiral scanning and a part executed in a raster scanning, the spiral scanning and the raster scanning are further divided and calculated into a plurality of subprograms respectively, and the subprograms are alternately executed in order, so that the shape correcting polishing work by the spiral scanning and the raster scanning is performed.
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