| 摘要 |
SLH, CLH, and an output of the weight sensor enter a main control section to calculate MD, MDD, and WEL. The main control section makes up a negative-loop for stable automatic control. This section calculates GR(GL), SLC(GWD), SLC(MP), and SLC(WEL) for SL and CL control, and calculates crucible moving rate from GD(GL) and CI(MD), and determines SL and CL by using these parameters to control crystal-growing.
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