发明名称 PHOTOSENSITIVE POLYMER COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive polymer composition capable of giving a pattern of a good shape with intrasurface uniformity in patterning on metallic foil and ensuring no peeling between the metallic foil and the pattern. SOLUTION: The photosensitive polymer composition is applied onto a metallic foil, prebaked, exposed and developed to form a pattern and has <=25&times;10-6 (1/ deg.C) average coefficient of thermal linear expansion in the range of 30-100 deg.C after curing. The composition contains (A) a polymer, (B) an assistant compound which assists adhesion to the metal and (C) a photosensitive agent as essential components.
申请公布号 JP2001330962(A) 申请公布日期 2001.11.30
申请号 JP20000146224 申请日期 2000.05.18
申请人 TORAY IND INC 发明人 KASUMI KENICHI;YUMIBA TOMOYUKI;FUJIMOTO KOJI
分类号 G03F7/085;C08K5/34;C08K5/36;C08L101/00;G03F7/037;G03F7/038;G03F7/40;H01L21/027;H01L21/312 主分类号 G03F7/085
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