SEMICONDUCTOR MANUFACTURING AND INSPECTING DEVICE

摘要

A semiconductor manufacturing and inspecting device capable of maintaining an excellent connection state for long period and easily removing a ceramic substrate from a supporting container, comprising the ceramic substrate having a conductor layer formed on the surface thereof or therein, the supporting container, and external terminals connected to the conductor layer, characterized in that the conductor layer is connected to the external terminals by crimping the external terminals onto the conductor layer utilizing the elastic force of an elastic body or by crimping the external terminals onto the other conductor layer connected to the conductor layer.