发明名称 Liquid dispensing systems and methods
摘要 The present invention provides systems and methods of dispensing liquids. In one embodiment, the system includes a pump with a removable pump module with at least one displacement piston and at least one piston valve. A motor and base assembly provide the supporting components of the pump which can be used in environments where precise small volumes of ultra-pure liquids must be transferred from a reservoir to a point of use. The preferred embodiment of the system prevents contaminants and air bubbles from being introduced into the liquid to be dispensed by placing a filter across the discharge line downstream from the pump, and providing a separate drawback line for performing the drawback of the liquid in the dispensing nozzle.
申请公布号 US6322337(B1) 申请公布日期 2001.11.27
申请号 US19990360851 申请日期 1999.07.24
申请人 IVEK CORPORATION;SILICON VALLEY GROUP, INC. 发明人 BENSLEY DOUGLAS S.;BARNEY JOHN E.;DIMAGGIO FRANK;TANNY MARK;BABIKIAN DIKRAN
分类号 F04B7/06;F04B13/00;(IPC1-7):F04B7/00 主分类号 F04B7/06
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