发明名称 |
Liquid dispensing systems and methods |
摘要 |
The present invention provides systems and methods of dispensing liquids. In one embodiment, the system includes a pump with a removable pump module with at least one displacement piston and at least one piston valve. A motor and base assembly provide the supporting components of the pump which can be used in environments where precise small volumes of ultra-pure liquids must be transferred from a reservoir to a point of use. The preferred embodiment of the system prevents contaminants and air bubbles from being introduced into the liquid to be dispensed by placing a filter across the discharge line downstream from the pump, and providing a separate drawback line for performing the drawback of the liquid in the dispensing nozzle.
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申请公布号 |
US6322337(B1) |
申请公布日期 |
2001.11.27 |
申请号 |
US19990360851 |
申请日期 |
1999.07.24 |
申请人 |
IVEK CORPORATION;SILICON VALLEY GROUP, INC. |
发明人 |
BENSLEY DOUGLAS S.;BARNEY JOHN E.;DIMAGGIO FRANK;TANNY MARK;BABIKIAN DIKRAN |
分类号 |
F04B7/06;F04B13/00;(IPC1-7):F04B7/00 |
主分类号 |
F04B7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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