Semiconductor integrated circuit fabrication,申请号GB20000027232-传众专利搜索

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发明名称	Semiconductor integrated circuit fabrication
摘要
申请公布号	GB2362508(A)	申请公布日期	2001.11.21
申请号	GB20000027232	申请日期	2000.11.07
申请人	* INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	DOUGLAS D * COOLBAUGH;JAMES S * DUNN;PETER J * GEISS;PETER B * GRAY;DAVID L * HARAME;KATHRYN T * SCHONENBERG;STEPHEN A * ST.ONGE;SESHADRI * SUBBANNA
分类号	H01L21/762;H01L21/763;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;(IPC1-7):H01L21/824	主分类号	H01L21/762
代理机构		代理人
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