FLUORINE-CONTAINING SYNTHETIC QUARTZ GLASS AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To obtain fluorine-containing synthetic quartz glass having high transmissivity of vacuum ultraviolet ray and homogeneous fluorine atom concentration by manufacturing fluorine-containing porous silica parent material in an atmosphere containing a gaseous fluorine compound and then subjecting the material to vetrification. SOLUTION: Gaseous oxygen, gaseous hydrogen and gaseous raw material for manufacturing silica are supplied from a burner to a reaction region, silica fine particles are formed in this reaction region by flame hydrolysis of the gaseous raw material for manufacturing silica and further the silica fine particles are deposited on a base material rotatably arranged in the reaction region to manufacture porous silica parent material and then the parent material is molten to obtain quartz glass. In this manufacturing method of synthetic quartz glass, gaseous fluorine compound is supplied into a parent material manufacturing device from a position other than a burner at the time of manufacturing the parent material to manufacture the fluorine-containing porous silica parent material in the atmosphere containing the gaseous fluorine compound.