发明名称 Method and apparatus for agitation of workpiece in high pressure environment
摘要 An apparatus for agitating a workpiece in a high pressure environment comprises a workpiece holder, a bearing, a pressure chamber housing, and a nozzle. The workpiece holder couples to the pressure chamber housing via the bearing. The nozzle couples to the pressure chamber housing. The workpiece holder comprises protrusions and a region for holding the workpiece. In operation a fluid exits the nozzle and impinges the protrusions of the workpiece holder causing the workpiece holder to rotate, which agitates the workpiece.
申请公布号 AU5756401(A) 申请公布日期 2001.11.20
申请号 AU20010057564 申请日期 2001.05.07
申请人 TOKYO ELECTRON LIMITED 发明人 THOMAS R. SUTTON;ROBERT KOCH
分类号 H01L21/687 主分类号 H01L21/687
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