| 摘要 |
PROBLEM TO BE SOLVED: To make stable production possible by preventing static electricity on air knives to prevent the electrostatic destruction of a semiconductor device and a shift of the threshold voltage Vth of a TFT. SOLUTION: An apparatus for manufacturing a semiconductor device on a substrate comprises air knives 104, 105, 106 for spraying a gas against the substrate 100, and means 107, 109 for casting soft X-rays on the gas sprayed by the air knives. In a method for manufacturing a semiconductor device on the substrate, the gas to be sprayed by the air knives 104, 105, 106 against the substrate 100 is applied against the substrate 100 while soft X-rays are directly cast on the gas.
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