| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a power device provided with an emergency power source for monitoring leakage of a processing solution and reduction of the exhaust pressure of a processing chamber, during a specified time after power supply is cut off, and a solution processing apparatus which uses the power device and cleans semiconductor wafers, LCD boards, etc., for example. SOLUTION: The power device 200 has a switching power source 21 of a converting means which converts AC current into DC current, and a charging apparatus which has a charger 1 and a battery 2 to be charged by the charger 1. The device 200 outputs one of current supplied from the power source 21 and current supplied from the battery 2.</p> |
