发明名称 Method for forming bump, semiconductor device and method for making the same, circuit board, and electronic device
摘要 The invention provides a method for readily forming a bump with a desired width, a semiconductor device and a method for making the same, a circuit board, and an electronic device. A method for forming a bump includes forming an opening in an insulating film which exposes at least a part of a pad, and forming the bump so as to be connected to the pad. A resist layer 20 defines a through hole which extends over at least a part of the pad in plan view. A metal layer is formed in the opening so as to connect to the exposed portion of the pad.
申请公布号 US2001040290(A1) 申请公布日期 2001.11.15
申请号 US20010843924 申请日期 2001.04.30
申请人 SEIKO EPSON CORPORATION 发明人 SAKURAI KAZUNORI;OTA TSUTOMU;MATSUSHIMA FUMIAKI;MAKABE AKIRA
分类号 H01L21/60;H01L23/31;H01L23/485;(IPC1-7):H01L23/48;H01L23/52;H01L29/40;H01L21/44 主分类号 H01L21/60
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