PLASMA REACTION VESSEL AND METHOD FOR DECOMPOSING GAS BY PLASMA

摘要

PROBLEM TO BE SOLVED: To enhance the efficiency of a reaction by uniformizing the flow velocity distribution of the gas passing in the reaction vessel and prolonging the stay of the gas in the plasma at a position with high-flow velocity part (center of space). SOLUTION: This plasma reaction vessel is provided with the first flat-plate electrode and second flat-plate electrode opposed to each other, a dielectric interposed between the electrodes and a means for imparting a potential difference between the electrodes. A high voltage is impressed between the electrodes to decompose the gas in the plasma decomposition region between the electrodes, and plural protrusions are formed on one or both sides of the dielectric.