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发明名称
摘要
申请公布号
JP2001522138(A)
申请公布日期
2001.11.13
申请号
JP20000519127
申请日期
1998.11.02
申请人
发明人
分类号
C23C16/44;C23C16/48;G01K1/12;H01L21/00;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
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