SUBSTRATE CARRYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrying device capable of efficiently carrying a substrate in the manufacturing site of a flat display device, a semiconductor device or the like. SOLUTION: This substrate carrying device 10 comprises a carrying surface 16 partitioned into a plurality of areas 22 juxtaposed in a first carrying direction and a second carrying direction right-angled to the first carrying direction and each allowing a substrate 14 to wait therein; and a substrate moving means 24 for moving the substrates on the carrying surface and transferring the substrate between the first carrying directional or second carrying directional adjacent areas. In such a structure, the overtaking, bypassing or reverse feeding of the substrate can be performed to reduce the congestion of the substrate within the substrate carrying device.