发明名称 |
Method for producing narrow pores and structure having the narrow pores, and narrow pores and structure produced by the method |
摘要 |
Provided is a method for producing regularly ordered narrow pores excellent in linearity, and a structure with such narrow pores. A method for producing a narrow pore comprises a step of radiating a particle beam onto a workpiece, and a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece. <IMAGE> <IMAGE> <IMAGE> |
申请公布号 |
EP1016621(A3) |
申请公布日期 |
2001.11.07 |
申请号 |
EP19990310330 |
申请日期 |
1999.12.21 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
AIBA, TOSHIAKI;MOTOI, TAIKO;IWASAKI, TATSUYA;NOJIRI, HIDETOSHI;DEN, TOHRU |
分类号 |
B81C99/00;B23K15/00;B23K15/08;B81C1/00;C25D11/16;H01L21/302;H01L21/306;H01L21/316;H01L21/461 |
主分类号 |
B81C99/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|