发明名称 Method for producing narrow pores and structure having the narrow pores, and narrow pores and structure produced by the method
摘要 Provided is a method for producing regularly ordered narrow pores excellent in linearity, and a structure with such narrow pores. A method for producing a narrow pore comprises a step of radiating a particle beam onto a workpiece, and a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece. <IMAGE> <IMAGE> <IMAGE>
申请公布号 EP1016621(A3) 申请公布日期 2001.11.07
申请号 EP19990310330 申请日期 1999.12.21
申请人 CANON KABUSHIKI KAISHA 发明人 AIBA, TOSHIAKI;MOTOI, TAIKO;IWASAKI, TATSUYA;NOJIRI, HIDETOSHI;DEN, TOHRU
分类号 B81C99/00;B23K15/00;B23K15/08;B81C1/00;C25D11/16;H01L21/302;H01L21/306;H01L21/316;H01L21/461 主分类号 B81C99/00
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