| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspecting device having a function to generate a high performance discriminating means in short period even when few pieces of sample data of defects exist. SOLUTION: Adjustment by human hand is facilitated and reflection of knowledge about the defect other than the sample data of the defect is enabled by using discrimination by a logic table in which discriminating conditions are specified by every kind of defects. In addition, time to generate logic is shortened by sorting the sample data by every piece of data with similar feature values and providing a means to automatically construct the logic table. |
