发明名称 InSb THIN FILM SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To obtain an InSb thin film substrate which has high sensitivity and reliability and is applicable to a magnetoelectric transducer. SOLUTION: An Sb film as a first layer 3 and an In film 4 as a second layer having prescribed thicknesses are laminated on substrates 1A, 1B to constitute stoichiometric composition. This InSb thin film substrate 10 has an InSb compound semiconductor crystal film 5 of stoichiometric composition formed on the In film 4. The thickness of the Sb film 3 as the first layer is 1.5-6 nm.
申请公布号 JP2001308408(A) 申请公布日期 2001.11.02
申请号 JP20000125435 申请日期 2000.04.26
申请人 VICTOR CO OF JAPAN LTD 发明人 OURA HIDEO;OKUYAMA SHINOBU;TAKASHIMA NOBUKAZU
分类号 C23C14/06;C23C14/08;C23C14/10;C23C14/14;H01L43/06;(IPC1-7):H01L43/06 主分类号 C23C14/06
代理机构 代理人
主权项
地址
您可能感兴趣的专利