| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing ink jet printer heads whereby residues generated by etching a mask to work discharge nozzles are prevented from adhering to discharge nozzles and electrode terminals. SOLUTION: An orifice plate 15 with thermoplastic polyimide adhesive layers applied to both faces is first attached onto a diaphragm not illustrated on which the mask film 16 is formed. The resist mask 17 is formed to a limited neighborhood of a region where discharge nozzles are to be formed. The mask film 16 is then etched. Subsequently the resist mask 17 is removed to expose the mask film 16. A thick film resist 19 is coated and patterned to open only the discharge nozzle part and the electrode terminal part. Discharge nozzles 21 are bored to the orifice plate 15 by helicon wave etching. Overetching is carried out for several minutes at this time to a level so that the orifice plate 15 is etched only by a thickness d. The thick film resist 19 is completely removed.
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