| 摘要 |
<p>PURPOSE: A surface inspection device is provided to detect a flaw on a specular surface of an object to be inspected with accuracy. CONSTITUTION: A surface inspection device(1) so arranged a light(1a) is irradiated from a point light source or close to a point light source(4), the light is refracted by a Fresnel lens(5) so as to converge in a condition of being close to parallel, the refracted light is reflected by a half mirror(6), the light is irradiated on generally whole area of a specular surface(2) to be inspected and the reflected light is introduced into an image capturing unit(10) provided at a position where the light converges.</p> |
