发明名称 Method of fabricating row lines of a field emission array and forming pixel openings therethrough
摘要 A method for fabricating row lines over a field emission array in which two mask steps are used to define row lines and pixel openings through selected regions of each row line. A first mask may be employed in the removal of dielectric material and conductive material from between pixel rows and from substantially above each pixel of the field emission array. A second mask may be used in the removal of semiconductor material from between the adjacent rows of pixels. Alternatively, a first mask may be employed in the definition of row lines, while a second mask may be used in the formation of pixel openings. Field emission arrays having a semiconductive grid and a relatively thin passivation layer exposed between adjacent row lines are also disclosed.
申请公布号 US2001030496(A1) 申请公布日期 2001.10.18
申请号 US20010879785 申请日期 2001.06.12
申请人 DERRAA AMMAR 发明人 DERRAA AMMAR
分类号 H01J3/02;H01J9/02;(IPC1-7):H01J1/62;H01J63/04;H01J1/02 主分类号 H01J3/02
代理机构 代理人
主权项
地址