| 摘要 |
<p>A polishing apparatus (10) comprises a circular-disk type surface plate (12) being driven by a plate motor (14), and a circular-disk type polish head (16) for supporting an polishing object (18). An abrasive cloth (20) which being opposed and contacted to the polishing object is stuck on the rotating surface plate. The polish head is coupled by shaft (22) to head motor (24) driving the polish head. The shaft has mounted a strain sensor (36) to its surface. The strain sensor provides a sensor signal representing strain tilting the shaft by a force to the polish head due to friction between polishing object and polish pad. This allows end point detection of the polishing process.</p> |
