| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for processing semiconductor manufacturing data in which it is not required to designate the process order and item order on every process procedure table at the time of extracting the data about synonymous items for a plurality of lots on a plurality of process procedure tables of the same kind prepared for manufacturing a specific semiconductor device. SOLUTION: In this method, desired data can be extracted under the same instruction among process procedure tables among which process codes, the same process code appearing order, item codes, and the same item code appearing order do not change by instructing data extraction by not using the process order and item order, but the process codes, the same process code appearing order, item codes, and the same item code appearing order on the process procedure tables.
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