发明名称 |
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND LIQUID-CRYSTAL DISPLAY DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem where the width of an LDD cannot be measured after completion of a thin-film transistor, so far. SOLUTION: There are provided an LDD corresponding region 6d which corresponds to an LDD structure of a thin-film transistor, a P heavy doping region 6e which is positioned in the region adjacent to the LDD corresponding region 6d and has a nature of an n-type semiconductor different from the LDD corresponding region 6d, a non-doping region 6c which is positioned in the region adjacent to the LDD corresponding region 6d and has a nature of an intrinsic semiconductor, and first and second electrode terminals 20a and 20b which are provided at both short-side edge parts of the LDD corresponding region 6d and electrically connect to the LDD corresponding region 6d. The deviation amount of the LDD structure of thin-film transistor from the design value of LDD length is practically agreed with that of LDD corresponding region 6d from the design value for width.</p> |
申请公布号 |
JP2001284593(A) |
申请公布日期 |
2001.10.12 |
申请号 |
JP20000091097 |
申请日期 |
2000.03.29 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
NAKAMURA AKIRA |
分类号 |
G02F1/136;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L21/66;H01L29/786;(IPC1-7):H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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