EVAPORATION BOAT

摘要

PROBLEM TO BE SOLVED: To provide an evaporation boat low in a temperature gradient, excellent in controllability in a low temperature region and also capable of uniformizing the size of the material grains by the use of a cover. SOLUTION: This evaporation boat has a vessel 11 to be charged with an evaporation material and an upper sheet 13 having through holes for the passage of the evaporation material and provided on the upper part of the evaporation boat. The upper sheet is composed of a graphite sheet having the holes of <=1 mm diameter.