发明名称 Scanning force microscope probe cantilever with reflective structure
摘要 A scanning force microscope probe cantilever having a reflective structure. In one embodiment, the described scanning force microscope probe cantilever includes a reflective structure on the cantilever. In one embodiment, light is directed to the reflective structure on the cantilever in a direction having a directional component from a fixed end to a free end of the cantilever. In one embodiment, light is reflected from the reflective structure in a direction having a directional component from the free end to a fixed end of the cantilever.
申请公布号 US6298715(B1) 申请公布日期 2001.10.09
申请号 US19990471467 申请日期 1999.12.22
申请人 MFI TECHNOLOGIES CORPORATION 发明人 THOMSON DOUGLAS J.;LADA CHRISTOPHER O.
分类号 G01B7/34;G01Q20/02;G01R1/06;G01R31/302;H01L21/66;(IPC1-7):G01B5/28 主分类号 G01B7/34
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