ABRASIVE MATERIAL AND SURFACE WORK METHOD OF RUBBING TWO SURFACES TOGETHER

摘要

PROBLEM TO BE SOLVED: To obtain a workpiece of super precision surface roughness by interposing fine spherical plastic between two sheets of the workpieces and rubbing them together. SOLUTION: In the super precision surface finish of a semiconductor wafer, a plastic substrate for a liquid crystal panel, a glass substrate, etc., as a method of satisfying requirement without giving a flaw to a surface of a workpiece, the method is work to surface roughness of abrasive material grain size or less by interposing an abrasive material of very fine spherical plastic of 0.01 to 10μm grain size between both the workpieces to be rubbed together.