GAS FUMIGATION METHOD AND SYSTEM

摘要

A method and system are disclosed for fumigating a region with a non- flammable gaseous mixture including phosphine. A sensor senses the concentration of phosphine for atmosphere of the region and a flow controlle r controls flow to the region in response to the sensed concentration. A recyc lingpassage removes a portion of the atmosphere from the region and returns the atmosphere to create a recycle flow through the region. In addition, a gas m ixing system is provided to supply the non-flammable mixture by mixing phosphine f rom a phosphine source and an inert substance from an inert substance source.