| 摘要 |
A substrate transfer robot has arms 10, 20, 28 to be arranged in high-temperature vacuum atmosphere. To effectively cool the arms, a cooling block 30 having a cooling line P formed therein for circulating coolant is fixed to a first arm 10, as one of the arms 10, 20, 28 which are accommodated in a transfer chamber 2 of which inside is in a vacuum atmosphere. A driving shaft 11 for driving the first arm 10 is provided with a feed passage 13A and a return passage 13B formed along the axial direction thereof for supplying and collecting the coolant to and from the cooling line P of the cooling block 30. A swivel joint 40 is provided on the lower end of the driving shaft to allow the connection between the passage to an external cooling circulating means 8 even when the driving shaft 11 is rotated.
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