ELECTROSTATIC ACTUATOR AND INK JET HEAD

摘要

PROBLEM TO BE SOLVED: To obtain an electrostatic ink jet head having one counter electrode made of an ITO film in which durability is enhanced and the counter electrodes are prevented from sticking each other. SOLUTION: The electrostatic ink jet head has one electrode made of an ITO film. Assuming the peak intensities on the (222) and (400) faces appearing in an X-ray diffraction pattern of the crystal structure of an ITO electrode are (222) and (400), the orientation ratio f(400) on the (400) face of the ITO film defined as [(400)/ (222)+(400)}]×100 (%) is set in the range of 40% to 95%. When an ITO film is formed to satisfy these conditions, the counter electrodes do not stick each other and a durable electrostatic ink jet head can be realized.