ANISOTROPY THIN FILM EVALUATION METHOD AND EVALUATION DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To measure and evaluate an optical anisotropy of a thin film sample at a high speed and moreover with accuracy. SOLUTION: A light emitted from a light source is made into parallel rays with the prescribed diameter by a lens and is then made into a definite state of polarized light by a polarizer. After the reflected light which is emitted when the definite state of polarized light is admitted to the surface of a film sample 3 enters a phase element 7 and an analyzer 8, the light intensity is detected by a two-dimensional CCD light detector 6 and is displayed by a monitor 8 to measure and evaluate the optical anisotropy distribution of the film sample. Pairs of a light source and a detector may be arranged, in parallel to equip a sample stage with a function for parallel movement.