MICROELECTROMECHANICAL ACTUATORS INCLUDING DRIVEN ARCHED BEAMS FOR MECHANICAL ADVANTAGE

摘要

Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One o r more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the drive n arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof. By allowing independent movement of the actuated elements, a variety of actuator applications may be provided wherein it is desired to actuate multiple elements in the same or different directions. For example, first and second driven arched beams may extend parallel to one another, such that the actuated elements that are mechanically coupled to the first and second driven arched beams move in a same direction by the further arching of the thermal arched beam. In other embodiments, the first and second arche d beams arch away from each other, such that the actuated elements that are coupled to th e first and second driven arched beams move in opposite directions by the further archin g of the thermal arched beam. In yet other embodiments, the first and second driven arched beams arch toward one another, such that the actuated elements that are mechanical ly coupled to the first and second driven arched beams move in opposite directions by the further arching of the thermal arched beam.