METHOD AND APPARATUS FOR TREATING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for treating the surface of a substrate by supplying chemical to a treating tank, stopping supply of chemical to the treating tank after it is filled with chemical and then immersing the substrate into the chemical for a prescribed time in which treating time can be corrected accurately, even if there is a difference between the temperature of chemical supplied into the treating tank and the ambient temperature of the treating tank and the immersion time is long. SOLUTION: Temperature of chemical supplied into the treating tank 10 is measured, and the temperature of chemical in the treating tank is calculated at an intermediate point of a preset immersion time, based on the temperature of chemical and the ambient temperature of the treating tank. It is then used as an effective temperature for correcting the immersion time.