发明名称 Waveguide optical device and method of fabricating the same
摘要 First and second thin-film layers having different compositions are inserted between cladding layers to be stepped, and steps corresponding to a difference between the side etching amounts of these layers are formed. In this manner, symmetrical steps of about 0.5 mum can be reliably and easily formed on the side surfaces of a ridge waveguide.
申请公布号 US2001026672(A1) 申请公布日期 2001.10.04
申请号 US20010819224 申请日期 2001.03.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KINOSHITA JUNICHI
分类号 G02F1/017;G02B6/12;G02B6/122;G02B6/13;H01L31/10;H01S5/22;H01S5/223;(IPC1-7):G02B6/122 主分类号 G02F1/017
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