| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent overheating of a ceramic substrate, by breaking the circuit between a power supply and a resistance electric heater element, even if a fault occurs in a temperature-sensing element and a control device, and the temperature of the ceramic substrate is increased rapidly. SOLUTION: This device for manufacturing/inspecting a semiconductor is composed of a ceramic substrate, that has the resistance electric heater element consisting of one or at least two circuits, a heat-sensing means that measures the temperature of the ceramic substrate, a control part that controls power to be thrown into the resistance electrical heating element, based on the temperature that is detected by the heat-sensing means, a power supply that supplies the power to be thrown into the resistance electrical heater element, and a thermostat that breaks the power to be thrown into the resistance electrical heater element.</p> |
