| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat insulating material structure of a sintering furnace for a ceramic substrate, which enables simple removal in a short time, of deposited carbon on a heat insulating material. SOLUTION: This sintering furnace is provided with a circular-cylindrical heat insulating material 30 which is a part of a heat insulating material 22 which is connected to a heater 23, so as to be removable from the heat insulating material 22, wherein the material of the circular-cylindrical heat insulating material 30 has the same composition as that of the heat insulating material 22 and is not contaminated with carbon; and by placing the heat insulating material 30 in the connecting part of the furnace heat insulating material 22 and the heater 23, the heat insulating material 22 having deposited carbon whereon can electrically be insulated from the heater 23. |
