| 摘要 |
PROBLEM TO BE SOLVED: To reduce an energy consumption amount of a clean room. SOLUTION: A clean space 1 is provided with a local clean space 5 surrounded by a partition 3. A part of the partition 3 constituting the side wall of the space 5 is released. A plurality of fan/heater/filter units 7 are provided to input air from the space 1 and supply temperature-regulated and cleaned air to the space 5. Through operation of the units 7, the space 5 is brought into a further positive pressure in comparison with the space 1. A device 11 to need the high degree of cleanness is situated at the internal part of the space 5. An air return space 25 is mounted in the underfloor of the space 1 and the space 5. Air in the space 1 is circulated by an upward flow through a suction port 17, a changeover damper 19, an outer governor 21, a filter 23, and a space 25.
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