PLASMA, CVD SYSTEM, AND METHOD FOR DETECTING ITS MALFUNCTION

摘要

PROBLEM TO BE SOLVED: To detect the malfunction of a susceptor before it occurs, to prevent the occurrence of defective articles, and to improve yield. SOLUTION: A plasma CVD system 1, where plasma is generated between a couple of parallel plate RF electrodes disposed in a chamber 2 to deposit a film on the surface of a wafer placed on one of the RF electrode, is provided. This plasma CVD system 1 is provided with the following: an RF generator 3 for supplying high frequency voltage to the RF electrodes; an RF matching box 4 disposed between the RF generator 3 and the RF electrodes; a DC bias detecting means for detecting DC bias signals from the RF matching box 4; and a judging means 5a for judging the presence of arcing in the chamber 2 on the basis of the detected DC bias signals.