| 发明名称 |
Device for applying photoresist to a base body surface |
| 摘要 |
An applicator device for applying photoresist to a surface of a base body having a receiving device therefor, including a photoresist feeder movable relative to the base body, the feeder being a point source device, and a device for performing a defined movement of the base body, comprising a conically shaped tip formed on the point source device for applying photoresist in a defined spot.
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| 申请公布号 |
US6294020(B1) |
申请公布日期 |
2001.09.25 |
| 申请号 |
US19990242768 |
申请日期 |
1999.02.19 |
| 申请人 |
HEIDELBERGER DRUCKMASCHINEN AG |
发明人 |
LüTHJE HOLGER;DAAUD SIMONE;BOETTCHER REINULF |
| 分类号 |
G03F7/16;B05B13/04;B05C5/00;B05C5/02;B05C11/00;B05C11/10;B05D1/26;B81C1/00;G03F7/18;H01L21/027;(IPC1-7):B05C1/02 |
主分类号 |
G03F7/16 |
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