摘要 |
PROBLEM TO BE SOLVED: To provide an ultra-thin board piezoelectric vibration element which is easy to mass-produce since wire bonding is possible, generates no variation in characteristics, can suppress unnecessary spurious, and having electrode structure which is easy in electrode film thickness control and can prevent a CI value from deterioration. SOLUTION: As for electrode constitution, an exciting electrode on a piezoelectric element board has thinning structure in order to perform energy confinement to only a desired resonance mode, to realize film thickness control and to make a film thickness free from the deterioration of a resistance value.
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