| 摘要 |
PROBLEM TO BE SOLVED: To provide a microprobe capable of simplifying the constitution, improving measuring accuracy on the sample surface, and not requiring alignment adjustment in each measurement, and a scanning probe device using the microprobe. SOLUTION: This microprobe is equipped with a low resolution cantilever part 110 supported on a support part 101 and having integrally-formed heater lamination parts 111a and 111b, heater parts 1121 and 1122 formed on the heater lamination parts 111a and 111b, piezo resistors 1221 and 1222 installed on bent parts 111c and 111d, and a movable part 111e having a low resolution probe 111g, and with a high resolution cantilever part 130 supported on the support part 101 and having integrally-formed piezo resistors 131, 132 installed on bent parts 130a, 130b, and a movable part 130c having a high resolution probe 130e. |
