| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of avoiding charge-up without reducing the amount of dose to a sample. SOLUTION: The charged particle beam device comprises a radiation means 21, 23 for radiating a charged particle beam to a sample 15 and image pickup means 43, 44 for picking up the two-dimensional image of a secondary beam generated from the sample 15 with the radiation of the charged particle beam. The radiation means 21, 23 guide the charged particle beam into a partial region in an image-pickup view of the image pickup means 43, 44 with the trimming of the cross section of the charged particle beam. Replacement means 24, 28 are further provided for replacing at least either of the position of the partial region in the image-pickup view or the position of the sample.</p> |
