发明名称 Insulated gate semiconductor device and method of manufacturing the same
摘要 Dot-pattern-like impurity regions 104 are artificially and locally formed on a channel forming region 103. The impurity regions 104 restrain the expansion of a drain side depletion layer toward the channel forming region 103 to prevent the short channel effect. The impurity regions 104 allow a channel width W to be substantially fined, and the resultant narrow channel effect releases the lowering of a threshold value voltage which is caused by the short channel effect.
申请公布号 US2001023105(A1) 申请公布日期 2001.09.20
申请号 US20010811238 申请日期 2001.03.16
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD., JAPANESE CORPORATION 发明人 YAMAZAKI SHUNPEI
分类号 H01L29/78;H01L21/225;H01L21/8238;H01L21/8249;H01L27/06;H01L29/06;H01L29/10;H01L29/15;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L29/78
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