发明名称 |
Insulated gate semiconductor device and method of manufacturing the same |
摘要 |
Dot-pattern-like impurity regions 104 are artificially and locally formed on a channel forming region 103. The impurity regions 104 restrain the expansion of a drain side depletion layer toward the channel forming region 103 to prevent the short channel effect. The impurity regions 104 allow a channel width W to be substantially fined, and the resultant narrow channel effect releases the lowering of a threshold value voltage which is caused by the short channel effect.
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申请公布号 |
US2001023105(A1) |
申请公布日期 |
2001.09.20 |
申请号 |
US20010811238 |
申请日期 |
2001.03.16 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD., JAPANESE CORPORATION |
发明人 |
YAMAZAKI SHUNPEI |
分类号 |
H01L29/78;H01L21/225;H01L21/8238;H01L21/8249;H01L27/06;H01L29/06;H01L29/10;H01L29/15;H01L29/786;(IPC1-7):H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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