| 摘要 |
PROBLEM TO BE SOLVED: To realize a charged particle beam device, in which an expansion of a probe diameter can be remarkably reduced while keeping a probe current constant. SOLUTION: An output signal of a feedback device 5, in which a detection current Id detected by a detection aperture 4 is converted to a voltage and a signal for feedback is generated, is supplied to an objective lens control part 8 via a condenser lens control part 6 and a signal regulator 7. The feedback signal whose size has been regulated by the signal regulator 7 is compared with an objective lens control signal by the objective lens control part 8, and based on the result of the comparison, the intensity of an objective lens 2 is controlled. A condenser lens 1 is controlled by the condenser lens control part 6 such that the probe current of the charged particle irradiated to a sample 3 is kept constant, and the objective lens 2 is controlled by the objective lens control part 8 to stabilize a focusing condition of the charged particle probe.
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