METHOD OF MANUFACTURING RECORDING MEDIUM, METHOD OF MANUFACTURING MASTER DISK FOR MANUFACTURE OF RECORDING MEDIUM, DEVICE FOR MANUFACTURE OF RECORDING MEDIUM AND DEVICE FOR MANUFACTURE OF MASTER DISK FOR MANUFACTURE OF RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To accurately form fine recesses and projections having sufficiently a smaller width or track pitch than the spot of the optical limit of the laser light used for the formation of the fine recesses and projections without influences of the length of the recesses and projections. SOLUTION: The objective fine recesses and projections are formed in steps of forming a heat sensitive material layer 12 on a substrate which constitutes a recording medium or a master disk for the manufacture of the recording medium, of forming a modified part 12s of the pattern according to the objective fine recesses and projections in the heat sensitive material layer by irradiating the layer with laser light according to the objective recesses and projections, and of patterning the heat sensitive material layer by developing the layer 12. In the process of irradiating with laser light in particular, the laser light is modulated at a higher frequency than the frequency of the period of the fine recesses and projections so that the pattern without depending on the length of the fine recesses and projections can be formed.