,申请号JP19940133638-传众专利搜索

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发明名称
摘要
申请公布号	JP3208008(B2)	申请公布日期	2001.09.10
申请号	JP19940133638	申请日期	1994.05.24
申请人		发明人
分类号	H01L21/302;B01J3/02;C23C16/509;H01L21/304;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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